Accelerating grid

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

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Details

313 30, 313 39, 3133601, 3133611, H01J 314, H01J 726

Patent

active

044396848

ABSTRACT:
An accelerating grid particularly for an ion beam, consisting of at least e orifice plate which is fastened along an elastic outer rim thereof to a support. The orifice plate or plates includes a plurality of through-holes with mutually oriented central axes, preferably directed towards a common focusing point. A plurality of slots in the elastic outer rim maintain the alignment of the orifice plate center relative to the focus point during heat-induced expansion of the plate.

REFERENCES:
patent: 3048727 (1962-08-01), Krefft
patent: 3143680 (1964-08-01), Klein et al.
patent: 3546511 (1970-12-01), Shimula
patent: 3567982 (1971-03-01), Droppa et al.
patent: 3936691 (1976-02-01), Bakker et al.
patent: 4028579 (1977-06-01), King
patent: 4164682 (1979-08-01), Palac
patent: 4229674 (1980-10-01), Hoet
patent: 4333034 (1982-06-01), Ohgoshi et al.

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