Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2006-03-07
2006-03-07
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
07007549
ABSTRACT:
The present invention relates to a flowmeter suitable for a micro flow sensor. The flowmeter of the present invention comprises a resistive heater to be inserted into a fluid, AC power with a first frequency supplied to the resistive heater to periodically heat the resistive heater, a signal processing unit for detecting a first signal from the resistive heater in relation to a temperature variation of the resistive heater by the AC power, and obtaining a phase lag of the first signal relative to the heat generation in the resistive heater, and an operation unit for calculating a flow rate based on the obtained phage lag. According to the present invention, the flowmeter of the present invention has a wide measurement range and high measurement accuracy with a simple structure.
REFERENCES:
patent: 6079253 (2000-06-01), Bonne et al.
patent: 6223593 (2001-05-01), Kubisiak et al.
David G. Cahill, “Thermal Conductivity Measurement From 30 to 750K: The 3ω Method”, Rev. Sci. Instrum. 61 (2), Feb. 1990, pp. 802-808, 1990 American Institute of Physics, New York.
M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang, “Thermal Flow Sensor for Liquids and Gases Based On Combinations of Two Principles”, Sensors and Actuators 73 (1999), 1998, pp. 7-13, Elsevier Science S.A., Germany.
Gerlinde Bedö, Heike Fannasch, Rudolf Müller, “A Silicon Flow Sensor For Gases and Liquids Using AC Measurements”, Sensors and Actuators 85 (2000), 1999, pp. 124-132, Elsever Science S.A., Germany.
Choi Young Ki
Chung Won Seok
Kwon Oh-myoung
Lee Joon Sik
Park Seung-ho
Lefkowitz Edward
Mack Corey D.
Seoul National University Industry Foundation
The Webb Law Firm
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