Optics: measuring and testing – For light transmission or absorption
Patent
1997-05-20
1999-04-13
Kim, Robert
Optics: measuring and testing
For light transmission or absorption
374 32, 374 45, G01N 2100, G01K 1700
Patent
active
058943528
ABSTRACT:
The preferred embodiment of the invention measures the temperature increase of a light-transmitting optical component to determine the optical absorption of the optical component. Accurately determining the optical absorption of light-transmitting optical components advantageously allows for the accurate and efficient selection of light-transmitting optical components for use in an optical system. In one embodiment, an optical absorption tester holds multiple optical components and, for each optical component, the tester includes a temperature sensor placed in contact with the optical component and a reference temperature sensor placed in the vicinity of the optical component.
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Cymer Inc.
Kim Robert
Ogonowsky Brian D.
Smith Zandra V.
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