Absorption measurements of materials

Details Absorption measurements of materials Absorption measurements of materials

1987-12-18

1989-08-15

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

356370, 436 34, G01N 2121, G01N 2175

Patent

active

048577383

ABSTRACT:
Two methods of determination of the chemical changes induced in a film of material such as photoresist that has been exposed to electromagnetic radiation. Two methods use measurement of polarized light reflected by the film mounted on a substrate to determine a real refractive index or a complex refractive index of the film. Two other methods use measurement of polarized light by the film mounted on a (partly) transparent substrate to determine a real refractive index or a complex refractive index of the film.

REFERENCES:
patent: 3448268 (1969-06-01), Proctor
patent: 3524983 (1970-08-01), Voelz
patent: 3985447 (1976-10-01), Aspnes
patent: 4555767 (1985-11-01), Case et al.
Bey, "Optical Film Thickness Monitoring", Rev. Sci. Instru., 42(1), Jan. 1971, pp. 57-60.
Nagendra et al., "Optical Constants of Absorbing Films", Vacuum, 31(3), Mar. 1981, pp. 141-145.
Heavens, "Optical Properties of Thin Solid Films", Butterworth Scientific Publications, London, 1955, pp. 74-80.

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