Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent
2007-10-16
2007-10-16
Sikder, Selina (Department: 2912)
Equipment for production, distribution, or transformation of ene
Distribution, modification or control
Semiconductor, transistor or integrated circuit
Design Patent
active
29215644
CLAIM:
We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.
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Mizukami Shunsuke
Oohashi Kaoru
Ueda Takehiro
Ladas and Parry LLP
Sikder Selina
Tokyo Electron Limited
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