Absorbing compounds for spin-on-glass anti-reflective...

Details Absorbing compounds for spin-on-glass anti-reflective... Absorbing compounds for spin-on-glass anti-reflective...

2005-07-05

2005-07-05

Peng, Kuo-Liang (Department: 1712)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

C556S458000, C552S208000, C552S209000, C552S271000, C528S034000, C528S039000, C525S477000

Reexamination Certificate

active

06914114

ABSTRACT:
An absorbing ether-like compound including a siliconethoxy, silicondiethoxy, or silicontriethoxy species attached to a naphthalene or anthracene chromophore via an oxygen linkage is used as an organic light-absorbing compound. The absorbing ether-like compound is incorporated into spin-on glass materials to provide anti-reflective coating materials for deep ultraviolet photolithography. A method of synthesizing the light-absorbing ether compounds is based on the reaction of an alcohol-substituted chromophore with an acetoxysilicon compound in the presence of alcohol. A method of making absorbing spin-on-glass materials including the absorbing ether-like compounds is also provided.

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