Absolute-pressure type of pressure sensor

Details Absolute-pressure type of pressure sensor Absolute-pressure type of pressure sensor

2005-04-26

2005-04-26

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S706000

Reexamination Certificate

active

06883379

ABSTRACT:
An absolute-pressure type of pressure sensor is provided. The sensor has a pressure detecting device having a metal diaphragm. Strain gauges are disposed on one surface of the diaphragm, whose other surface is formed to receive fluid to be detected. The sensor comprises a lid, relay board, two seal rings, and input/output terminal. The lid provides a reference pressure space. The relay board is electrically connected to the gauge and composed of laminated ceramic members having both of through holes formed to pass through both sides thereof and a protrusion formed outwardly. The two seal rings are located to face the two sides of the board, respectively. The one seal ring air-tightly connects the relay board and the diaphragm. The other seal ring air-tightly connects the relay board and the lid. The terminal is electrically connected to the relay board and mounted on the protrusion of the relay board.

REFERENCES:
patent: 4840061 (1989-06-01), Peltier
patent: 4986861 (1991-01-01), Nishida et al.
patent: 5144843 (1992-09-01), Tamura et al.
patent: 5319980 (1994-06-01), Kremidas
patent: 5407501 (1995-04-01), Koen et al.
patent: 5783748 (1998-07-01), Otani
patent: 20010049965 (2001-12-01), Groger
patent: 1 126 260 (2001-08-01), None

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