Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1989-07-12
1989-12-26
Orsino, Joseph A.
Measuring and testing
Fluid pressure gauge
Diaphragm
296211, 73721, 338 4, G01L 904
Patent
active
048889920
ABSTRACT:
An absolute pressure transducer includes a hollow glass tube supporting across one end thereof a differential pressure responsive semiconductor plate having piezoresistive elements diffused therein and an evacuated sealed chamber within the tube exposed to the plate. A method for making the transducer and providing the evacuated chamber within the tube adjacent to the plate includes the steps of mounting the plate across the end of the tube to form a first fluid-tight seal therewith, inserting a loose glass plug within the tube to define the chamber, exposing the interior of the tube to a vacuum, concurrently heating the tube in the vicinity of the plug to allow the heated tube wall to constrict around the plug in response to the internal vacuum and to fuse with the plug to form a second fluid-tight seal therewith and allowing the tube and plug to cool to trap the vacuum in the chamber. A pressure transmitter uses the transducer with electrical connections to the piezoresistive elements in a fluid filled system for applying an external pressure to the plate to produce an output signal from the elements representative of the differential pressure between the evacuated chamber and the external pressure.
REFERENCES:
patent: 3406572 (1968-10-01), Robillard
patent: 3817107 (1974-06-01), Shimada et al.
patent: 4023562 (1977-05-01), Hynececk et al.
patent: 4217783 (1980-08-01), Ito et al.
patent: 4295116 (1981-10-01), Studlien
patent: 4303903 (1981-12-01), Matsuoka et al.
patent: 4452202 (1984-06-01), Meyer
patent: 4488436 (1984-12-01), Mohri et al.
patent: 4499774 (1985-02-01), Tsuchiya et al.
patent: 4502335 (1985-03-01), Wamstad et al.
patent: 4586018 (1986-04-01), Bettman
patent: 4610256 (1986-09-01), Wallace
patent: 4703658 (1987-11-01), Mrozack, Jr. et al.
patent: 4841777 (1989-06-01), Hershey et al.
Mathias Milton W.
Wilda Douglas W.
Halista Mitchell J.
Honeywell Inc.
Medved Albin
Orsino Joseph A.
Swarthout Brent A.
LandOfFree
Absolute pressure transducer and method for making same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Absolute pressure transducer and method for making same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Absolute pressure transducer and method for making same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1572069