Absolute pressure transducer

Details Absolute pressure transducer Absolute pressure transducer

1985-10-04

1986-09-02

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 700

Patent

active

046099662

ABSTRACT:
Described herein is a capacitive absolute pressure transducer including a flat base plate (9) of insulating material, e.g., of glass, with a fixed capacitor electrode (10), aligned on the base plate. A silicon-material moving diaphragm electrode (5) of the capacitor is at least partly aligned with the fixed electrode (10), properly spaced to implement a hermetically sealed vacuum chamber (7) between the fixed electrode (10) and moving diaphragm electrode (5). Electrical contacts (12) are attached to the fixed electrode (10) and the moving diaphragm electrode (5). According to the invention, the flat base plate (9) is bonded to an electrically conductive wafer (8) to implement a laminated substrate (2), the diaphragm electrode (5) fabricated integral with a surrounding and essentially thicker collar part (18), and the electrical contact to the fixed capacitor plate (10) in the area of the vacuum chamber (7) is a well (11, 12) extending through the base plate (9) to the wafer (8).

REFERENCES:
patent: 4405970 (1983-09-01), Swindal et al.
patent: 4467394 (1984-08-01), Grantham et al.
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4530029 (1985-07-01), Beristain

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