Absolute humidity sensors and methods of manufacturing humidity

Details Absolute humidity sensors and methods of manufacturing humidity Absolute humidity sensors and methods of manufacturing humidity

1978-11-20

1980-05-13

Smith, John D.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

733365, 204 56R, 324 61R, 427 88, 427 89, 427102, 427103, 427 93, G01R 2702

Patent

active

042030870

ABSTRACT:
Disclosed are humidity sensor structures, and fabrication techniques, which result in uniform and reliable humidity sensing, reliable electrical connections in small sensors, and simplified and inexpensive manufacture.

REFERENCES:
patent: 3523244 (1970-08-01), Goodman et al.
patent: 4143177 (1979-03-01), Kovac et al.
Cook, "Anodizing Silicon is Economical Way to Isolate IC Elements," Electrons, Nov. 13, 1975, pp. 109-113.
Watanabe et al., "Formation and Properties of Porous Silicon and its Application," J. Electrochem Soc.; Solid-State Science and Technology, Oct. 1975, pp. 1351-1355.

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