Absolute humidity sensor

Details Absolute humidity sensor Absolute humidity sensor

2005-01-11

2005-01-11

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Gas analysis

Moisture content or vapor pressure

C073S029010, C073S029050, C388S931000, C361S286000

Reexamination Certificate

active

06840103

ABSTRACT:
An absolute humidity sensor for a microwave oven is disclosed. The absolute humidity sensor includes a substrate having a first hole and a second hole in a predetermined region, a membrane formed on the substrate, a humidity sensing element formed on the membrane where the first hole is formed, for detecting humidity exposed to the air, having a variable resistance value depending on the detected humidity, and a temperature compensating element formed on the membrane where the second hole is formed, for compensating for the resistance value of the humidity sensing element. For package, the absolute humidity sensor further includes a stem joined with a lower portion of the substrate, having pins for electrically connecting with the outside, and a hole to pass through external humidity, a wire for electrically connecting the electrode pads of the humidity sensing element and the temperature compensating element with the pins of the stem, and a metal shield case formed on an upper portion of the stem to cover an entire surface of the stem including the humidity sensing element and the temperature compensating element.

REFERENCES:
patent: 5388443 (1995-02-01), Manaka
patent: 5551283 (1996-09-01), Manaka et al.
patent: 5659127 (1997-08-01), Shie et al.
patent: 021225 (1981-01-01), None
patent: 0376721 (1990-07-01), None
patent: 2172999 (1986-10-01), None

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