Absolute fluid pressure sensor

Details Absolute fluid pressure sensor Absolute fluid pressure sensor

1987-02-20

1988-04-26

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73701, G01L 908

Patent

active

047396644

ABSTRACT:
A pressure sensor uses two fluidically coupled piezoelectrically driven, vibrating cantilever structures, each tuned to the same fundamental resonance frequency. One cantilever, the driver, is electrically driven at resonance and at constant vibrational amplitude. The other cantilever, the receiver, responds due to the gaseous coupling and generates an output signal proportional to pressure.

REFERENCES:
patent: 3187579 (1965-06-01), Ferrau et al.
patent: 3399572 (1968-09-01), Riordan et al.
patent: 3425281 (1969-02-01), Barz
patent: 4409840 (1983-10-01), Roberts
patent: 4455874 (1984-06-01), Paros
patent: 4628739 (1986-12-01), Bruggen et al.

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