Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1983-06-07
1986-09-16
Willis, Davis L.
Optics: measuring and testing
By particle light scattering
With photocell detection
356358, G01B 902
Patent
active
046119159
ABSTRACT:
The improved Absolute Distance Sensor has achieved presently a resolution of about 0.03 .mu.m (RMS) for measurements over long distances. A two-color, synthetic Michelson interferometer employing a CO.sub.2 source is designed to sequentially switch between four sets of R and P line pairs and thereby provide a basis for forming simultaneous equations which are employed to greatly reduce the half wavelength ambiguity typical of single wavelength interferometers.
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Bien et al., "Absolute Distance Measurements by Variable Wavelength Interferometry", Applied Optics, vol. 20, No. 3, pp. 400-403, 2/81.
C. W. Gillard et al, "Absolute Distance Interferometry", Optical Engineering, Jan./Feb. 1981, vol. 20, No. 1, pp. 129-134.
C. W. Gillard et al, "Progress in Absolute Distance Interferometry", SPIE, Nov. 82, pp. 1-9.
Buholz Neal E.
Gillard Calvin W.
Wells, III William M.
Collier Stanton E.
Koren Matthew W.
Singer Donald J.
The United States of America as represented by the Secretary of
Willis Davis L.
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