Absolute distance measuring interferometry using multi-pass reso

Details Absolute distance measuring interferometry using multi-pass reso Absolute distance measuring interferometry using multi-pass reso

1994-11-30

1996-09-10

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, G01B 902

Patent

active

055550894

ABSTRACT:
The absolute distance measuring interferometer (ADMI) is a multi-pass interferometer which is a resonant cavity consisting of two plane parallel mirrors whose length is referenced to a stabilized laser system. The resonant cavity can be used in order to measure very precisely (to within a fraction of a wavelength) the distance between a reference plane and an object. Due to its multi-pass nature, the length of the cavity can be measured much more accurately than for a conventional interferometer. The optical transmission bandwidth of the resonant cavity is inversely proportional to its length. A direct measure of the transmission bandwidth provides an extremely precise (to within a fraction of a wavelength) absolute measure of the length of the cavity. This eliminates the need for careful alignment during the motion of one of the mirrors of the multi-pass interferometer. In fact one can completely decouple the mirrors of the resonant interferometer and reassemble the resonant cavity at a different separation and measure the change in distance. This is extremely useful in situations where it is not possible to change distances while maintaining alignment of the cavity.

REFERENCES:
patent: 5412474 (1995-05-01), Reasenberg et al.
"Measurements of Ultrasmall Displacements", Jacobs, SPIE vol. 126, Aug.-1977, pp. 39-43.

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