Absolute capacitance manometers

Measuring and testing – Fluid pressure gauge – Diaphragm

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G01L 912

Patent

active

047856696

ABSTRACT:
A single fluid-pressure transducer unit, of the type in which sensed electrical capacitance is varied in accordance with electrode deflections induced by pressure changes, is rendered capable of characterizing a wide range of pressures extending from near-vacuum to atmospheric levels, with the aid of a distinctive composite-electrode capsule which interacts uniquely with a conventional type of sheet-metal diaphragm. While sensing relatively low pressures, the exhibited capacitance of the transducer is essentially that appearing between the diaphragm and a nearby electrode carried by the capsule, but, at or near atmospheric pressure, the diaphragm physically engages and deflects that electrode, which is elastically deformable, causing it to vary a further capacitance appearing between that deformable electrode and a companion stationary electrode which is also part of the capsule.

REFERENCES:
patent: 3484732 (1969-12-01), Postma
patent: 4390925 (1983-06-01), Freud
patent: 4425799 (1984-01-01), Park
patent: 4499773 (1985-02-01), Crampton et al.

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