Abrasive shaped article, abrasive disc and polishing method

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428 662, 428323, 428327, 428404, 428446, B32B 300

Patent

active

060775815

ABSTRACT:
An abrasive shaped article composed of at least 90% by weight, based on the weight of the abrasive shaped article, of silica and having a bulk density of 0.2 g/cm.sup.3 to 1.5 g/cm.sup.3, a BET specific surface area of 10 m.sup.2 /g to 400 m.sup.2 /g and an average particle diameter of 0.001 .mu.m to 0.5 .mu.m. An abrasive disc having fitted thereto at least one of the abrasive shaped article is advantageously used for polishing a material such as substrate. Preferably at least two kinds of abrasive shaped articles are fitted to the supporting auxiliary, at least one kind of which has a bulk density of 0.7 g/cm.sup.3 to 1.5 g/cm.sup.3 and at least one kind of which has a bulk density of at least 0.2 g/cm.sup.3 but smaller than 0.7 g/cm.sup.3.

REFERENCES:
patent: 4544604 (1985-10-01), Usui
patent: 5401568 (1995-03-01), Hahn
patent: 5418043 (1995-05-01), Ogawa

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