Abrasive liquid for metal and method for polishing

Details Abrasive liquid for metal and method for polishing Abrasive liquid for metal and method for polishing

2004-11-24

2011-10-18

Alanko, Anita (Department: 1713)

Etching a substrate: processes

Nongaseous phase etching of substrate

Using film of etchant between a stationary surface and a...

C438S692000, C438S633000, C438S645000, C438S687000

Reexamination Certificate

active

08038898

ABSTRACT:
An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film-forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent in forming a protecting film and (5) water; and a method for polishing.

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