Abrasive liquid for metal and method for polishing

Details Abrasive liquid for metal and method for polishing Abrasive liquid for metal and method for polishing

2005-05-24

2005-05-24

Norton, Nadine G. (Department: 1765)

Compositions

Etching or brightening compositions

C252S079400, C438S692000

Reexamination Certificate

active

06896825

ABSTRACT:
An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film-forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent in forming a protecting film and (5) water; and a method for polishing.

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Written Opinion from the Australian Patent Office for Application No. SG 200200664-1, mailed Aug. 23, 2004.

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