Abrading – Accessory – Dressing
Patent
1999-04-15
1999-12-14
Banks, Derris Holt
Abrading
Accessory
Dressing
451444, 451548, B24B 2118, B24B 3300, B24B 4726, B24B 5500
Patent
active
060010088
ABSTRACT:
With an abrasive dresser for a polishing disc of a chemical-mechanical polisher for abrading a flat rotatable polishing disc of a chemical-mechanical polisher which supplies a chemical polishing agent to the surface of the polishing disc to polish the surface of an article on top of the polishing disc, a sectional shape of an abrasive surface being a peripheral portion of a flat disc shaped base member which protrudes upwards over a predetermined width with an abrasive grit distributed substantially uniformly over and affixed to the surface thereof, is formed as a convex circular arc curved surface. In this way, the portion of contact with the polishing disc of the chemical-mechanical polisher becomes surface contact, thereby enabling a reduction in wear during use and an increase in life, together with an increase in the efficiency of abrading the polishing disc.
REFERENCES:
patent: 2137200 (1938-11-01), Boyer
patent: 4010583 (1977-03-01), Highberg
patent: 5454752 (1995-10-01), Sexton et al.
patent: 5567503 (1996-10-01), Sexton et al.
patent: 5605499 (1997-02-01), Sugiyama et al.
patent: 5626509 (1997-05-01), Hayashi
Fujimori Keiichi
Matsuo Junji
Banks Derris Holt
Fujimori Technology Laboratory Inc.
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