Abrading – Rigid tool – Stationary
Patent
1996-08-08
1997-12-02
Rose, Robert A.
Abrading
Rigid tool
Stationary
451533, 451 41, 451285, 51293, 51297, B23F 2103
Patent
active
056929501
ABSTRACT:
An abrasive construction for modifying a surface of a workpiece, such as a semiconductor wafer. The abrasive construction comprises: a three-dimensional, textured, fixed abrasive element; at least one resilient element generally coextensive with the fixed abrasive element; and at least one rigid element generally coextensive with and interposed between the resilient element and the fixed abrasive element, wherein the rigid element has a Young's Modulus greater than that of the resilient element.
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Bruxvoort Wesley J.
Buhler James D.
Goetz Douglas P.
Hollywood William J.
Rutherford Denise R.
Busse Paul W.
Griswold Gary L.
Kirn Walter N.
Minnesota Mining and Manufacturing Company
Nguyen George
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