Abrasive composition

Details Abrasive composition Abrasive composition

1997-12-01

1999-04-20

Jones, Deborah

Abrasive tool making process, material, or composition

With inorganic material

51308, 51309, 252 791, B24D 334

Patent

active

058955097

ABSTRACT:
An abrasive composition which can realize chemical-mechanical polishing superior in polishing speed and polishing uniformity.
The abrasive composition comprises abrasive grains, isopropyl alcohol, and water. Grain sizes of the abrasive grains are preferably 30 to 250 nm, and the abrasive grains are preferably SiO.sub.2. Further, it is preferable that contents of the abrasive grains and isopropyl alcohol are 5 to 30 wt % and 1 to 15 wt %, respectively. The abrasive composition of the present invention is characterized in that it is deaerated.

REFERENCES:
patent: 5094687 (1992-03-01), Elepano
patent: 5352277 (1994-10-01), Sasali
patent: 5697992 (1997-12-01), Ueda et al.
patent: 5804513 (1998-09-01), Sakatani et al.

Affiliated with

Also associated with

Rating

Abrasive composition does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Abrasive composition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Abrasive composition will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2245691