Abrasive cloth dresser

Details Abrasive cloth dresser Abrasive cloth dresser

1994-06-28

1995-06-06

Kisliuk, Bruce M.

Abrading

Machine

Rotary tool

451286, 451287, 451285, 451288, B24B 500, B24B 2900

Patent

active

054217687

ABSTRACT:
An abrasive cloth dresser which can efficiently remove reaction products soaked into abrasive cloths for polishing semiconductor wafers etc. without scattering the reaction products. The abrasive cloth dresser includes a rotating hollow arm shaft 7, a high-pressure pure water jetting head 8 provided at a distal end of the hollow arm shaft, and a brush hood 11 provided at a distal end of the high-pressure pure water jetting head 8 and having a brush 16 planted thereto. The high-pressure pure water jetting head 8 includes a jet nozzle 83 through which high-pressure pure water is jetted for impacting reaction products soaked into a piece of abrasive cloth 3 to come out for removal. The brush 16 is elliptical in shape, and has a planted bristle density which is lower in a brush left-hand portion 161 near the high-pressure pure water injection center IC, but higher in a brush central portion 162 and a brush right-hand portion 163. Accordingly, the spent pure water and the reaction products are caused to reside in a pure water pool area WP, following which the pure water having lost energy and the reaction products are discharged through the brush left-hand portion 161 without scattering to the surroundings.

REFERENCES:
patent: 2870580 (1955-04-01), Norton
patent: 3388504 (1965-07-01), Day
patent: 3813825 (1974-06-01), Weber et al.
patent: 4532666 (1985-08-01), Smyth
patent: 4831784 (1989-05-01), Takahashi
patent: 5032203 (1991-07-01), Doy et al.
patent: 5121572 (1992-06-01), Hilscher
patent: 5191738 (1993-03-01), Nakazato et al.
patent: 5216843 (1993-06-01), Breiudgel et al.
patent: 5310455 (1994-05-01), Pasch et al.
patent: 5329734 (1994-07-01), Yu

Affiliated with

Also associated with

Rating

Abrasive cloth dresser does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Abrasive cloth dresser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Abrasive cloth dresser will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-983276