Above room temperature ferromagnetic silicon

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component

Reexamination Certificate

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C257S421000, C148S239000, C428S842300

Reexamination Certificate

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07405086

ABSTRACT:
A manganese-implanted silicon substrate exhibits ferromagnetism and a Curie temperature above room temperature when magnetized. The implant is done at a temperature of between about 250 C and about 800 C, while the manganese concentration is between about 0.01 atomic percent and 10 atomic percent. The silicon substrate can be p- or n-type with a doping concentration between 1015and 1021cm−3. Annealing may be done to increase the saturation magnetization.

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