Abnormality detection device for laser oscillator piping system

Coherent light generators – Particular active media – Gas

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Details

372 55, 372 59, H01S 322, H01S 3223

Patent

active

049359371

DESCRIPTION:

BRIEF SUMMARY
TECHNICAL FIELD

The present invention relates to an abnormality detection device for a laser oscillator piping system used, for example, for precision processing and the like.


PRIOR ART

In general, when a laser discharge tube of a laser oscillator is actuated, the laser discharge tube is filled with a gas medium such as a mixture of carbon dioxide, nitrogen gas, and helium gas. In this case, used and deteriorated remaining gas medium must be withdrawn from the laser discharge tube as well as the piping system connected with the laser discharge tube, and subsequently, the laser discharge tube and the related piping system thereof must be filled with a new gas. However, but if an abnormality such as a penetration of outside air or leakage of inside gas exists in the piping system, an unnecessarily long time is required to withdraw the remaining gas medium, and further, it becomes difficult to determine when the withdrawal operation will end, resulting in a problem of an inconvenient practice.
To carry out the operation described above, a simple and reliable structure for a predetermined procedure for operating the structure should be prepared, but a satisfactorily appropriate prior art structure is not known. An object of the present invention is to provide an improved abnormality detection device for a laser oscillator piping system to cope with the aspect of the problem described above.


DISCLOSURE OF THE INVENTION

According to the present invention, there is provided an abnormality detection device for a laser oscillator piping system including a laser discharge tube for generating a laser oscillation in a gas medium filled therein, gas medium circulating pipes connected with the laser discharge tube for circulating the gas medium through the gas medium circulating pipes, a gas medium circulalting pump arranged in the gas medium circulating pipes, a gas medium supply pipe for supplying a gas medium to the gas medium circulating pipes, a switching valve arranged in the gas medium supply pipe, a pressure sensor connected with the gas medium supply pipe, a gas medium gas exhaust pipe driven by a drive device for discharging the gas medium in the laser discharge tube and the gas medium circulating pipes, and a control device for controlling the operation of the laser oscillator piping system, in which the control device receives a signal from the pressure sensor and generates a signal to be supplied to the gas medium exhaust pump and a signal to be supplied to a display device, characterized in that, after the switching valve in the gas medium pipes is closed and the drive of the gas medium exhaust pump is started to be driven, the existence or non-existence of an abnormality of the laser oscillator piping system is detected and displayed based on a determination of whether or not an operation signal of the pressure sensor is generated within a predetermined length of time.


BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an arrangement of an abnormality detection device for a laser oscillator piping system as an embodiment of the present invention;
FIG. 2 is a flow chart showing an example of the operation of the device shown in FIG. 1.


DESCRIPTION OF THE PREFERRED EMBODIMENTS

An abnormality detection device for a laser oscillator piping system as an embodiment of the present invention is shown in FIG. 1.
In FIG. 1, the laser oscillator 1 includes a laser discharge tube 11, a total reflection mirror 12, an output coupling mirror 13, electrodes 141 and 142 on one side, and electrodes 143 and 144 on the other side. The electrodes 141 and 142 on one side are connected with one side of the output terminal of the power source 15, and the electrodes 143 and 144 on the other side are connected with the other side of the output terminal of the power source 15.
The gas piping connected with the laser discharge tube 11, includes the gas circulating pipes 211, 212, 213 and 214, the gas supply pipes 217 and 218, the gas exhaust pipe 215, and the gas circulation portion exhaust pipe 216. In the gas circulating

REFERENCES:
patent: 4283686 (1981-08-01), Daugherty et al.
patent: 4718071 (1988-01-01), Steffen
patent: 4794613 (1988-12-01), Nilsen et al.
patent: 4803693 (1989-02-01), Schramm

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