Ablative etch resistant coating for laser personalization of int

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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257665, H01L 2702

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active

053291522

ABSTRACT:
A programmable integrated circuit for prototyping applications including a first patterned metal layer, an insulation layer formed over the first metal layer and a second patterned metal layer formed over the insulation layer, the first and second patterned metal layers being formed with selectably removable regions, the insulation layer being formed with apertures overlying at least some of the selectably removable regions, and there being formed over the selectably removable regions a coating comprising a layer of a dielectric material of high laser radiation absorption coefficient.

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