Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-06-20
2008-12-16
Nguyen, Kiet T (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S305000
Reexamination Certificate
active
07465939
ABSTRACT:
The present invention provides an aberration correction device. The aberration correction device comprises a Wien filter element, a quadrupole element for compensating a focusing property of the Wien filter element, and at least one multipole element for spherical aberration correction. The Wien filter element and said quadrupole element are adapted to generate, in combination, an astigmatic image. Furthermore, the at least one multipole element is adapted to act essentially in a plane of sagittal or meridional focus of the astigmatic image. Thereby, chromatic aberration is reduced as well as spherical aberration can be corrected.
REFERENCES:
patent: 3979590 (1976-09-01), Andersen
patent: 6410924 (2002-06-01), Wang
patent: 6580073 (2003-06-01), Plies et al.
patent: 6784437 (2004-08-01), Rose
patent: 6797962 (2004-09-01), Rose et al.
patent: 6960763 (2005-11-01), Lopez et al.
patent: 4204512 (1993-08-01), None
patent: 19926927 (2000-12-01), None
patent: 10159454 (2003-06-01), None
patent: 1335402 (2003-08-01), None
patent: 1517353 (2005-03-01), None
patent: 1521289 (2005-04-01), None
International Search Report dated Nov. 9, 2005.
International Preliminary Report on Patentability dated Jan. 11, 2007.
H. Rose. “Inhomogeneous Wien filter as a corrector compensating for the chromatic and spherical aberration of low-voltage electron microscopes.” Optik. 1990 vol. 84(3): pp. 91-107.
H. Rose. “The retarding Wien filter as a high-performance imaging filter.” Optik. 1987 vol. 77(1): pp. 26-34.
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprufte
Nguyen Kiet T
Patterson & Sheridan LLP
LandOfFree
Aberration correction device and method for operating same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Aberration correction device and method for operating same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aberration correction device and method for operating same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4026007