Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2009-02-23
2011-10-11
Souw, Bernard E (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C369S112230, C369S112240, C369S112260, C359S388000, C359S646000, C359S672000
Reexamination Certificate
active
08035086
ABSTRACT:
To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two rotationally symmetric lenses arranged between two multipole lenses, three rotationally symmetric lenses are disposed between an objective lens and a multipole lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When using the objective lens with a long focal length, aberrations are corrected using two rotationally symmetric lenses among three rotationally symmetric lenses disposed between the objective lens and the multipole lens. When using the objective lens with a short focal length, e.g. for high resolution observation, aberrations are corrected using two rotationally symmetric lenses of a different combination to those used for a long focus, among the three rotationally symmetric lenses disposed between the objective lens and the multipole lens. (See FIG.3)
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Office Action from Japanese Patent Office in the corresponding Japanese Application No. 2008-064717, mailed Mar. 2, 2010 in Japanese and English.
Hirayama Yoichi
Yoshida Takaho
A. Marquez, Esq. Juan Carlos
Hitachi , Ltd.
Okinawa Institute of Science and Technology Promotion Corporatio
Souw Bernard E
Stites & Harbison PLLC
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