Aberration-correcting cathode lens microscopy instrument

Details Aberration-correcting cathode lens microscopy instrument Aberration-correcting cathode lens microscopy instrument

2008-03-25

2008-03-25

Berman, Jack I. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S305000, C250S310000

Reexamination Certificate

active

11364299

ABSTRACT:
An aberration-correcting microscopy instrument is provided. The instrument has a first magnetic deflector disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane of the first magnetic deflector. The instrument also has an electrostatic lens disposed in the exit plane of a first magnetic deflector, as well as a second magnetic deflector substantially identical to the first magnetic deflector. The second magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane of the second magnetic deflector. The instrument also has an electron mirror configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane of the second magnetic deflector.

REFERENCES:
patent: 5319207 (1994-06-01), Rose et al.
patent: 5336885 (1994-08-01), Rose et al.
patent: 6855939 (2005-02-01), Rose et al.
patent: PCT/US2007/062101 (2007-08-01), None
W.P. Skoczylas et al., “Electron Optical Benches for In-Line and Branches Systems A New Bench Designed for Mirror-Based Aberration Correction and Low Energy Electron Microscopy,” Review of Scientific Instruments, Oct. 1994, 3183-3193, vol. 65, No. 10, New York.
G.F. Rempfer et al., “Correction of Chromatic Aberration with an Electron Mirror,” Optik, Nov. 1992, pp. 3-8, vol. 92, No. 1, Germany.
G.F. Rempfer et al., “A Theoretical Study of the Hyperbolic Electron Mirror as a Correcting Element for Spherical and Chromatic Aberration in Electron Optics,” Journal of Applied Physics, May 1990, pp. 6027-6040, vol. 67, No. 10, New York.
L. Reimer, “Transmission Electron Microscopy,” Physics of Image Formation and Mircoanalysis, 1984, p. 115, Tokyo.
H. Spiecker et al., “Time-of-Flight Photoelectron Emission Microscopy TOF-PEEM: First Results,” Nuclear Instruments & Methods in Physics Research, Section A, Apr. 1998, pp. 499-506, vol. 406, Netherlands.
W.P. Skoczylas et al., “A Proposed Modular Imaging System for Photelectron and Electron Probe Microscopy with Aberration Correction, and for Mirror Microscopy and Low-Energy Electron Microscopy.” Ultramicroscopy, XP-002445438, 1991, pp. 252-261, vol. 36, North Holland.
L.H. Veneklasen, “The Continuing Development of Low-Energy Electron Microscopy for Characterizing Surfaces,” Review of Scientific Instruments, Dec. 1992, pp. 5513-5532, vol. 63, No. 12, New York.
W. Wan et al., “Simulation of a Mirror Corrector for PEEM3,” Nuclear Instruments & Methods in Physics Research, Section A, 2004, pp. 222-229, vol. 519, Netherlands.
H. Rose et al., “Outline of a Versatile Corrected LEEM,” Optik, Nov. 1992, pp. 31-44, vol. 92, No. 1, Germany.

Affiliated with

Also associated with

Rating

Aberration-correcting cathode lens microscopy instrument does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Aberration-correcting cathode lens microscopy instrument, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aberration-correcting cathode lens microscopy instrument will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3913395