Abatement system targeting a by-pass effluent stream of a...

Details Abatement system targeting a by-pass effluent stream of a... Abatement system targeting a by-pass effluent stream of a...

2005-01-18

2005-01-18

Spitzer, Robert H. (Department: 1724)

Gas separation: processes

Solid sorption

C095S133000, C096S135000, C096S142000, C423S210000

Reexamination Certificate

active

06843830

ABSTRACT:
An apparatus and method for abating toxic and/or hazardous gas species in a diluent gas stream line deriving from a by-pass line of a semiconductor process tool, comprising contacting the diluent gas stream with a dry resin sorbent material having an affinity for the toxic and/or hazardous gas species to effect the removal of at least a portion of the toxic and/or hazardous gas species by a chemisorbent or physisorbent reaction between the sorbent bed and the toxic gas component effectively reduces the concentration of the toxic gas component in the process diluent stream to below TLV.

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