A1 alloy films and melting A1 alloy sputtering targets for depos

Details A1 alloy films and melting A1 alloy sputtering targets for depos A1 alloy films and melting A1 alloy sputtering targets for depos

1997-07-07

1999-11-02

Zimmerman, John J.

Stock material or miscellaneous articles

Liquid crystal optical display having layer of specified...

With viewing layer of specified composition

20429813, 20419227, 148437, 420528, 420552, 349111, 428620, C23C 2100, C23C 1434

Patent

active

059766417

ABSTRACT:
An Al alloy film containing one kind or two or more kinds of alloy components selected from a group of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo and Mn in a total amount of 0.1 to 10 at %, and a melting Al alloy sputtering target for depositing the Al alloy film, wherein the above-mentioned film is used as a reflection film for an optical recording medium, a shading film for a liquid crystal display panel or for a solid image pickup device, and an Al alloy thin film line or electrode material for a semiconductor device.

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