A1 alloy films and melting A1 alloy sputtering targets for depos

Stock material or miscellaneous articles – Composite – Of metal

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420528, 420540, 420552, 420553, 428606, 428620, 428650, 428694RL, B32B 1504

Patent

active

055003010

ABSTRACT:
An Al alloy film containing one kind or two or more kinds of alloy components selected from a group of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo and Mn in a total amount of 0.1 to 10 at %, and a melting Al alloy sputtering target for depositing the Al alloy film, wherein the above-mentioned film is used as a reflection film for an optical recording medium, a shading film for a liquid crystal display panel or for a solid image pickup device, and an Al alloy thin film line or electrode material for a semiconductor device.

REFERENCES:
patent: 4024567 (1977-05-01), Iwata et al.
patent: 5032470 (1991-07-01), Shindo et al.

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