A-dual band IR sensor having two monolithically integrated stari

Details A-dual band IR sensor having two monolithically integrated stari A-dual band IR sensor having two monolithically integrated stari

1994-06-03

1996-04-30

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250332, 25033902, 25037008, 25037014, H01L 25065, H01L 27146, H01L 310296, G01J 522

Patent

active

055127509

ABSTRACT:
A compact dual band IR focal plane assembly provides simultaneous, coincident two-dimensional image readout. It includes a MIS-CID MWIR detector array formed in an epitaxial layer grown by the MBE process on the (111B) front face of an IR transparent crystalline first substrate, the pixels thereof forming LWIR transparent windows, with opaque connections thereto lying in aisles framing the windows, and a PV diode LWIR detector array formed in an epitaxial layer grown by the LPE process on the (111A) back face of the substrate, the LWIR pixels being aligned with the transparent MWIR pixels. An MWIR MUX is provided on an IR transparent silicon second substrate arranged in front of the first substrate. The opaque switch portion of the MWIR MUX is arrayed with apertures and aisles in alignment with the windows and aisles of the MIS-CID array. An LWIR MUX is provided on a third substrate bonded to the LWIR detector array beyond the image paths, the MWIR and LWIR MUXes providing simultaneous, coincident image readout.

REFERENCES:
patent: 4939369 (1990-07-01), Elabd
patent: 5036203 (1991-07-01), Solomon

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