8-alkyl-8-tricyclodecanyl 5-norbornene-2-carboxylates and method

Details 8-alkyl-8-tricyclodecanyl 5-norbornene-2-carboxylates and method 8-alkyl-8-tricyclodecanyl 5-norbornene-2-carboxylates and method

2000-03-01

2000-11-28

Geist, Gary

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C07C 6974

Patent

active

061537853

ABSTRACT:
A novel norbornene carboxylate compound and a method of producing the same are provided. The norbornene carboxylate compound is 8-alkyl-8-tricyclodecanyl 5-norbornene-2-carboxylate represented by formula (1): ##STR1## wherein R is methyl or ethyl.

REFERENCES:
patent: 4591626 (1986-05-01), Kawai et al.
Suwa et al, "ArF Single Layer Photoresists Based on Alkaline-Developable ROMP-H Resin," in Advances in Resist Technology and Processing XV, Will Conley, ed., Proceedings of SPIE vol. 3333, pp. 26-31, 1998.

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