3-dimensional micromachining with femtosecond laser pulses

Details 3-dimensional micromachining with femtosecond laser pulses 3-dimensional micromachining with femtosecond laser pulses

1997-06-13

1998-07-28

Mills, Gregory L.

Electric heating

Metal heating

By arc

21912185, B23K 2606

Patent

active

057865604

ABSTRACT:
A method of treating a material by generating an ultraviolet wavelength laser beam having femtosecond pulses; splitting the ultraviolet wavelength laser beam into a plurality of separate laser beams having femtosecond pulses; directing the separate laser beams onto a target point within a sample such that the femtosecond pulses of the separate beams overlap to create an intensity sufficient to treat the sample. Apparatus for treating a material that includes an ultraviolet laser for generating an ultraviolet wavelength laser beam having femtosecond pulse and directing that ultraviolet wavelength laser beam onto a beam splitter; a beam splitter for splitting the ultraviolet wave length laser beam into a plurality of separate laser beams having femtosecond pulses; directing the separate laser beams onto a target point within a sample such that the femtosecond pulses of the separate beams overlap to create an intensity sufficient to treat the sample.

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