3-D spiral stacked inductor on semiconductor material

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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C257S277000, C257S508000, C257S774000, C257S758000, C257S778000, C257S528000, C257S776000, C438S706000, C438S720000, C438S723000, C336S012000

Reexamination Certificate

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06841847

ABSTRACT:
A 3-D spiral stacked inductor is provided having a substrate with a plurality of turns in a plurality of levels wherein the number of levels increases from an inner turn to the outer turn of the inductor. First and second connecting portions are respectively connected to an inner turn and an outermost turn, and dielectric material contains the first and second connecting portions and the plurality of turns over the substrate.

REFERENCES:
patent: 5414402 (1995-05-01), Mandai et al.
patent: 6355535 (2002-03-01), Liou
patent: 6395637 (2002-05-01), Park et al.
patent: 6472285 (2002-10-01), Liou
patent: 20020157849 (2002-10-01), Sakata
patent: 20020157849 (2002-10-01), None

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