Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2006-04-11
2006-04-11
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C250S306000, C033S0010MP, C033S568000, C248S419000, C248S542000, C310S323170
Reexamination Certificate
active
07024925
ABSTRACT:
A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates. The 3-axis straight-line motion stage comprises a bottom plate40having a predetermined area and thickness; a X-axis stage10fixed in a reference area RR of the bottom plate40for moving in the direction of the X-axis a first X area RX1positioned from the reference RR to the direction of the X-axis; a Y-axis stage20positioned within the first X area RX1and fixed in a second X area RX2,which is located within the first X area RX1for moving in the direction of the Y-axis a second Y area RY1positioned from the second X area to the direction of the Y-axis; and a Z-axis stage30fixed in the second Y area RY2,which is located within the first Y area RY1and supporting a predetermined sample for moving the sample in the direction of the Z-axis.
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Gweon Dae Gab
Kim Dong Min
Kim Ki Hyun
Shim Jong Yeop
Akerman & Senterfitt
Korea Advanced Institute of Science and Technology
Larkin Daniel S.
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