2,4-diamino-s-triazinyl group-containing polymer and negative ra

Details 2,4-diamino-s-triazinyl group-containing polymer and negative ra 2,4-diamino-s-triazinyl group-containing polymer and negative ra

1996-10-29

1997-09-16

Acquah, Samuel A.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

528 86, 528104, 528107, 528113, 528119, 525480, 525534, 525540, C08F28300, C08G 828

Patent

active

056682263

ABSTRACT:
A polyhydroxystyrene having a 2,4-diamino-s-triazinyl group substituted for 1-50 mol % of its hydroxyl group and a weight average molecular weight of 3,000-50,000 is provided. A negative radiation-sensitive resist composition comprising the polymer, preferably along with a photo-acid generator and a crosslinking agent has high resolution and developability, affords a resist pattern of rectangular profile, and is shelf stable. The composition is thus very useful as resist material for LSI manufacture.

REFERENCES:
patent: 5506279 (1996-04-01), Babu et al.
patent: 5510233 (1996-04-01), Nakanishi et al.

Affiliated with

Also associated with

Rating

2,4-diamino-s-triazinyl group-containing polymer and negative ra does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with 2,4-diamino-s-triazinyl group-containing polymer and negative ra, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and 2,4-diamino-s-triazinyl group-containing polymer and negative ra will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-219168