(110) Oriented silicon wafer latch accelerometer and process for

Details (110) Oriented silicon wafer latch accelerometer and process for (110) Oriented silicon wafer latch accelerometer and process for

1988-09-29

1990-01-02

Powell, William A.

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73488, 73517R, 156644, 156647, 156657, 1566591, 156662, 428137, B32B 310, G01P 1500, H01L 21306, B44C 122

Patent

active

048912557

ABSTRACT:
A method for etching a (110) silicon wafer to produce latching cantilever beams, which bend parallel to the surface of the wafer. The resulting apparatus is also part of the invention.

REFERENCES:
patent: 4600934 (1986-07-01), Aine et al.
patent: 4670092 (1987-06-01), Motamedi
patent: 4732647 (1988-03-01), Aine
patent: 4776924 (1988-10-01), Delapierre
patent: 4783237 (1988-11-01), Aine et al.

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