Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2006-01-24
2006-01-24
Pak, Sung (Department: 2874)
Optical waveguides
With optical coupler
Switch
C385S025000, C385S052000
Reexamination Certificate
active
06990264
ABSTRACT:
A 1×N or N×1 optical switch based on a plurality of movable MEMS-created platforms, each carrying a light guiding structure such as a waveguide, where the position of the platforms determines which optical path is connected through the optical switch. The MEMS-created platforms are formed integral with the substrate of the optical switch. The waveguides residing on the movable platforms gradually change the direction of the optical signal in order to minimize losses. The movable platforms can move linearly or rotationally, for example. Also described is a method for fabricating such an optical switch and its components by etching from the bottom of the substrate and through the oxide.
REFERENCES:
patent: 4693547 (1987-09-01), Soref et al.
patent: 5039191 (1991-08-01), Myszka
patent: 5078514 (1992-01-01), Valette et al.
patent: 5235672 (1993-08-01), Carson
patent: 5245458 (1993-09-01), Taylor
patent: 5278692 (1994-01-01), Delapierre
patent: 5357590 (1994-10-01), Auracher
patent: 5596662 (1997-01-01), Boscher
patent: 5612815 (1997-03-01), Labeye et al.
patent: 5623564 (1997-04-01), Presby
patent: 5757986 (1998-05-01), Crampton et al.
patent: 5761350 (1998-06-01), Koh
patent: 5828800 (1998-10-01), Henry et al.
patent: 5848206 (1998-12-01), Labeye et al.
patent: 5920665 (1999-07-01), Presby
patent: 5923798 (1999-07-01), Aksyuk et al.
patent: 5926594 (1999-07-01), Song et al.
patent: 5970192 (1999-10-01), Osugi et al.
patent: 5990473 (1999-11-01), Dickey et al.
patent: 6072924 (2000-06-01), Sato et al.
patent: 6101299 (2000-08-01), Laor
patent: 6122423 (2000-09-01), You et al.
patent: 6137941 (2000-10-01), Robinson
patent: 6148124 (2000-11-01), Aksyuk et al.
patent: 6175675 (2001-01-01), Lee et al.
patent: 6205267 (2001-03-01), Aksyuk et al.
patent: 6219472 (2001-04-01), Horino et al.
patent: 6253011 (2001-06-01), Haake et al.
patent: 6275326 (2001-08-01), Bhlia et al.
patent: 6320993 (2001-11-01), Laor
patent: 6388789 (2002-05-01), Bernstein
patent: 6411765 (2002-06-01), Ono
patent: 6647168 (2003-11-01), Hsu et al.
patent: 6654523 (2003-11-01), Cole
patent: 6694071 (2004-02-01), Hsu
patent: 6836583 (2004-12-01), Hsu et al.
patent: 2002/0094151 (2002-07-01), Li
patent: 3817035 (1989-08-01), None
patent: 0 545 584 (1992-11-01), None
patent: 1004910 (2000-05-01), None
patent: 58068702 (1983-04-01), None
patent: 63063006 (1988-03-01), None
patent: 04177225 (1992-06-01), None
patent: 06109990 (1994-04-01), None
patent: 10123373 (1998-05-01), None
patent: 10-227986 (1998-08-01), None
patent: WO 01/77742 (2001-10-01), None
Bahadori, et al.,Automated Fiber-Waveguide Array Alignment, Journal Optical Communications, Fachverlag Schiele & Schon, Berlin, Germany, vol. 10, No. 2, Jun.1, 1989, pp. 54-55.
Benaissa, K.; and Nathan, A.; “Silicon Anti-Resonant Reflecting Optical Waveguides for Sensor Applications;”Journal of Sensors and Actuators(A Physical), vol. A65, 33-44, 1998.
Brown, K.S., Taylor, B.J.; Dawson; J.M.; Hornak, L.A.; “Polymer Waveguide Co-integration With Microelectromechanical Systems (MEMS) for Integrated Optical Metrology;”Proceedings of the SPIE(The International Society for Optical Engineering), vol. 3276, 1998.
Burcham, Kevin E.; and Boyd, Joseph T.; “Freestanding, Micromachined, Multimode Silicon Optical Waveguides at λ=1.3 μm for Microelectromechanical System Technology;”Journal of Applied Optics, vol. 37, No. 36, Dec. 20, 1998.
Churenkov, A. V.; “Silicon Micromechanical Optical Waveguide for Sensing and Modulation;”Journal of Sensors and Actuators(A Physical), vol. A57, No. 1, Oct. 1996.
Cook, J.P.D.; Este, G.O.; Shepherd, F.R.; et al.; “Stable, Low-Loss Optical Waveguides and Micromirrors Fabricated in Acrylate Polymers”Applied Optic Journal, vol. 37, No. 7, Mar. 1, 1998.
Cornett, Kimberly T.; Heritage, Jonathan P.; Solgaard, Olav; “Compact Optical Delay Line Based on Scanning Surface Micromachined Polysilicon Mirrors;”2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000.
de Labachelerie, M.; Kaou, N.; et al., “A Micromachined Connector for the Coupling of Optical Waveguides and Ribbon Optical Firbers;”Journal of Sensors and Actuators(A Physical), vol. A89, No. 1-2, Mar. 20, 2001.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Voltage-Controlled Micromechanical SOI Optical Waveguides;”IEEE TENCON, IEEE Region 10 International Conference on Microelectronics and VLSL—“Asia Pacific Microelectronics 2000”—Proceedings,1995.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Surface-Micromachined Epitaxial Silicon Cantilevers as Moveable Optical Waveguides on Silicon-on-Insulator Substrates;”Journal on Sensors and Actuators A, Physical, vol. A49, No. 1-2, Jun. 1995.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Surface-Micromachined Movable SOI Optical Waveguides;”Proceedings of the International Solid-State Sensors and Actuators Conference—Transducer, 1995.
Gorecki, Christopher; “Optimization of Plasma-Deposited Silicon Oxinitride Films for Optical Channel Waveguides;”Journal of Optics and Laser Engineering, vol. 33, No. 1, Jan. 2000.
Haronian, D.; “Bottlenecks of Opto-MEMS;”SPIE Proceedings—Mirco-Opto-Electro-Mechanical Systems, Glasgow, UK , May 22-23, 2000.
Haronian, D.; “Displacement Sensing Using Geometrical Modulation in Reflection Mode (GM-RM) of Coupled Optical Waveguides;”Journal of Micromechanics and Microengineering, vol. 8, No. 4, Dec. 1998.
Haronian. D.; “Suspended Optical Waveguide With In-Plane Degree of Freedom or Microelectro-Mechanical Applications;”Electronics Letters, vol. 34, No. 7, Apr. 2, 1998.
Hoffmann, Martin; Kopka, Peter; and Voges, Edgar; “Thermooptical Digital Switch Arrays in Silica-on-Silicon With Defined Zero-Voltage State;”Journal of Lightwave Technology, vol. 16, No. 3, Mar. 1998.
Jin, Young-Hyun; Seo, Kyoung-Sun; et al.; “An SOI Optical Microswitch Integrated With Silicon Waveguides and Touch-down Micromirror Actuators;” 2000 IEEE/LEOS International Conference on Optical MEMS, Aug. 21-24, 2000.
Koyanagi, Mitsumasa; “Optical Interconnection Using Polyimide Waveguide for Multi-Chip Module;”Proceedings of SPIE, Society of Photo-Optical Instrumentation Engineers, San Jose, CA, 1996.
Kruger, Michiel V.P.; Guddal, Michael H.; et al.; “Low Power Wirless Readout of Autonomous Sensor Wafer Using MEMS Grating Light Modulator;”2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000.
Kuwana, Yasuhiro;Hirose, Akinori; Kurino, Hiroyuki; et al.; “Signal Propagation Characteristics in Polyimide Optical Wave-guide With Micro-Mirrors for Optical Multichip Module;”Japanese Journal of Applied Physics, vol. 38, No. 4B, Apr. 1999.
Makihara, M.; “Microelectromechanical Intersecting Waveguide Optical Switch Based on Thermo-Capillarity;”2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000.
Makihara, M.; Sato, Makoto; Shimokawa, Fusao; et al.; “Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate;”Journal of Lightwave Technology, vol. 17, No. 1, Jan. 1999.
Makihara, M.; Shimokawa, F.; and Nishida, Y.; “Self-Holding Optical Waveguide Switch Controlled by Micromechanism;”IEICE Trans. Electronics(Japan), vol. E80-C, No. 2, Feb. 1997.
Maruo, Shoji; Ikuta, Koji; and Ninagawa, Toshihide; “Multi-Polymer Microsterolithography for Hybride Opto-MEMS” has the same information as “Advanced Micro Sterelithography wih Multi UV Polymers (System Development and Application to Three-Dimensional Optical Waveguides),” which is written in Japanese;Journal of Tansactions of the Institute of Electrical Engineers of Japan, Part E, vol. 120-E, No. 7, Jul. 2000.
Matsumoto, Takuji; Kuwana, Yasuhiro; Hirose, Akinori; “Po
Hsu Ying Wen
Telkamp Arthur R.
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