Organic compounds -- part of the class 532-570 series – Organic compounds – Diazooxide or diazotate
Patent
1987-12-28
1990-02-20
Higel, Floyd D.
Organic compounds -- part of the class 532-570 series
Organic compounds
Diazooxide or diazotate
534557, 534565, C07C11300, C07C11304
Patent
active
049027840
ABSTRACT:
Disclosed are substituted derivatives of 5-diazobarbituric acid selected from those having the formulas: ##STR1## wherein R.sub.1 and R.sub.2 are substituents selected from the group consisting of C.sub.3 to C.sub.12 alkyl, cyclohexyl, benzyl and C.sub.2 to C.sub.6 aralkyl groups, wherein R.sub.3 and R.sub.4 are substituents selected from the group consisting of C.sub.1 to C.sub.12 alkyl, cyclohexyl, benzyl or other C.sub.2 to C.sub.6 aralkyl groups and R.sub.5 is selected from the group consisting of .alpha.,.omega.-disubstituted C.sub.2 to C.sub.12 alkyl, methylene dicyclohexyl, or C.sub.1 to C.sub.6 dialkylphenylene.
These compounds provide DUV response with an absorption maximum near 260 nm. The substituents are chosen to be nonabsorbing alkyl groups that allow efficient photobleaching of the sensitizer during exposure.
The sensitizers of the present invention are designed to function in the DUV region and are useful in the manufacture of semi-conductor devices.
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Hopf Frederick R.
McFarland Michael J.
Higel Floyd D.
Hoechst Celanese Corporation
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