1,2-quinonediazide containing radiation-sensitive resin composit

Details 1,2-quinonediazide containing radiation-sensitive resin composit 1,2-quinonediazide containing radiation-sensitive resin composit

1991-07-03

1993-06-01

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430165, 430192, 430193, G03F 7023, G03C 161

Patent

active

052158578

ABSTRACT:
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.

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