1,2-Naphthoquinone diazide sulfonyl ester compound with linking

Details 1,2-Naphthoquinone diazide sulfonyl ester compound with linking 1,2-Naphthoquinone diazide sulfonyl ester compound with linking

1987-10-07

1989-05-30

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430165, 430189, 430190, 430193, 534556, G03C 154, C07C11300

Patent

active

048350850

ABSTRACT:
Compounds of the general formula (I) or (II) ##STR1## in which R is 1,2-naphthoquinone-2-diazide-4- or -5-sulfonyl and X is a straight-chain or branched C.sub.1 -C.sub.12 -alkylene group, which is unsubstituted or mono- or disubstituted by OH group or is --CH.dbd.CH--, are suitable as the light-sensitive component in photoresist materials. Both positive and negative images can be prepared with light-sensitive mixtures containing these compounds and a binder.

REFERENCES:
patent: 2907655 (1959-10-01), Schmidt et al.
patent: 3046111 (1962-07-01), Schmidt
patent: 3046124 (1962-07-01), Schmidt
patent: 3248220 (1966-04-01), Van Rhijn
patent: 3531414 (1970-09-01), Randell et al.
patent: 4104070 (1978-08-01), Moritz et al.

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