4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus
  6. With means for measuring, testing, or sensing
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Pattern for monitoring epitaxial layer washout

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Reexamination Certificate

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Phase shifter for laser annealing

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Reexamination Certificate

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Process and apparatus for making oriented crystal layers

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Reexamination Certificate

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