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Electromagnetically driven microactuated device and method of ma

Pumps – Motor driven – Magnetostrictive chamber
Patent

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Electrostatically actuated mesopump having a plurality of elemen

Pumps – Motor driven – Magnetostrictive chamber
Patent

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Electrostatically actuated pump with elastic restoring forces

Pumps – Motor driven – Magnetostrictive chamber
Reexamination Certificate

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Electrostrictive micro-pump

Pumps – Motor driven – Magnetostrictive chamber
Reexamination Certificate

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