Micro-electromechanical actuator with control logic circuitry

Micro-electromechanical device

Micro-scalable thermal control device

Microactuator arrangement

Microelectrical mechanical structure (MEMS) optical...

Microelectrical mechanical structure (MEMS) optical...

Microelectromechanical actuators including driven arched...

Microelectromechanical actuators including sinuous beam...

Micromechanical actuation apparatus

Micromechanical manipulator

Micromechanism linear actuator with capillary force sealing

Microminiature stirling cycle cryocoolers and engines

Microminiature stirling cycle cryocoolers and engines

Miniaturised device that can operate as an engine or a...

Modular construction stirling engine

Module for constructing a double-acting four-cylinder Stirling e

Monoprolellant/hypergolic powered proportional actuator

Motive device for converting a variation in temperature into mec

Moveable regenerator for stirling engines

Multi-bottle, no compressor, mean pressure control system for a