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Unilateral thermal buckle beam actuator

Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate

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Unilateral thermal buckle-beam actuator

Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate

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Utilization of quantum wires in MEMS actuators

Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Patent

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