4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. With monochromator structure
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High resolution etalon-grating spectrometer

Optics: measuring and testing – By dispersed light spectroscopy – With monochromator structure
Reexamination Certificate

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High resolution EUV monochromator/spectrometer

Optics: measuring and testing – By dispersed light spectroscopy – With monochromator structure
Patent

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