4. Optical: systems and elements
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Illuminating optical system in an exposure apparatus

Optical: systems and elements – Polarization without modulation – Polarizarion by dichroism
Patent

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Illumination optical system

Optical: systems and elements – Polarization without modulation – Polarizarion by dichroism
Patent

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Inorganic visible light reflection polarizer

Optical: systems and elements – Polarization without modulation – Polarizarion by dichroism
Reexamination Certificate

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Integrating polarization conversion system

Optical: systems and elements – Polarization without modulation – Polarizarion by dichroism
Reexamination Certificate

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