4. Optical: systems and elements
  5. Light interference
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Dual cavity MEMS tunable Fabry-Perot filter

Optical: systems and elements – Light interference – Electrically or mechanically variable
Reexamination Certificate

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Dual membrane single cavity Fabry-Perot MEMS filter

Optical: systems and elements – Light interference – Electrically or mechanically variable
Reexamination Certificate

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Dual-band fabry-perot mirror coating

Optical: systems and elements – Light interference – Electrically or mechanically variable
Reexamination Certificate

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Dynamic tuning of multi-path interference filter

Optical: systems and elements – Light interference – Electrically or mechanically variable
Reexamination Certificate

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