4. Material or article handling
  5. Apparatus for moving material between zones having different...
  6. Including serially arranged valves in path having a vertical...
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Peristaltic valve for transferring material between zones

Material or article handling – Apparatus for moving material between zones having different... – Including serially arranged valves in path having a vertical...
Patent

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Processing method and processing unit for substrate

Material or article handling – Apparatus for moving material between zones having different... – Including serially arranged valves in path having a vertical...
Reexamination Certificate

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